Unterschiede
Hier werden die Unterschiede zwischen zwei Versionen angezeigt.
| Beide Seiten der vorigen Revision Vorhergehende Überarbeitung Nächste Überarbeitung | Vorhergehende Überarbeitung | ||
| geraete:mfcs:mks [2025/02/16 15:17] – [Vorhandene Geräte] 141.58.146.166 | geraete:mfcs:mks [2025/02/18 02:37] (aktuell) – 141.58.224.203 | ||
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| Digitale Verbindung der MFCs über Modbus TCP: Verbindung/ | Digitale Verbindung der MFCs über Modbus TCP: Verbindung/ | ||
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| #Zero Flow Setzen: | #Zero Flow Setzen: | ||
| 4.9.2 Establish a Proper “No Flow” Condition Across the MFC Control Valve | 4.9.2 Establish a Proper “No Flow” Condition Across the MFC Control Valve | ||
| - | The definition of a “no flow” condition is that the pressure on the inlet side of the MFC is equal to the | + | |
| - | pressure on the outlet side of the MFC control valve. Whether the MFC is at atmospheric pressure, | + | The definition of a “no flow” condition is that the pressure on the inlet side of the MFC is equal to the pressure on the outlet side of the MFC control valve. Whether the MFC is at atmospheric pressure, vacuum pressure, or process pressure, the zero should not be initiated until the pressure differential across the MFC is zero. |
| - | vacuum pressure, or process pressure, the zero should not be initiated until the pressure differential | + | |
| - | across the MFC is zero. | + | NOTE MKS recommends that an MFC be zeroed at its operating inlet gas pressure. To successfully complete the recommended procedures, a positive shut off valve should be installed in the gas line to properlyisolate |
| - | NOTE MKS recommends that an MFC be zeroed at its operating inlet gas | + | |
| - | pressure. To successfully complete the recommended procedures, a | + | 1. Pressurize the gas line to the inlet of the MFC (open upstream positive shut off valve if required). |
| - | positive shut off valve should be installed in the gas line to properly | + | |
| - | isolate | + | |
| - | 1. Pressurize the gas line to the inlet of the MFC (open upstream positive shut off valve if | + | |
| - | required). | + | |
| 2. Open the downstream shut off valve and give the MFC a full scale set point. | 2. Open the downstream shut off valve and give the MFC a full scale set point. | ||
| - | 3. Let the MFC operate at full scale flow for 15 seconds and then close the downstream shut off | + | |
| - | valve while leaving the set point on the MFc | + | |
| + | 3. Let the MFC operate at full scale flow for 15 seconds and then close the downstream shut off valve while leaving the set point on the MFc | ||
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| 4. Allow the reported flow to fall to a stable zero value. | 4. Allow the reported flow to fall to a stable zero value. | ||
| NOTE The set point and flow signals can be monitored in real time on the plot | NOTE The set point and flow signals can be monitored in real time on the plot | ||
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| Modbus also support zero commands that can be sent over the primary | Modbus also support zero commands that can be sent over the primary | ||
| I/O (see I/O supplemental documentation for details). | I/O (see I/O supplemental documentation for details). | ||
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| # Vorhandene Geräte | # Vorhandene Geräte | ||
| - | Model #: | + | Model #: |
| - | Model #: | + | |
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